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ASM laser cutting machine LS100-2 is a laser scribing machine designed for high-precision cutting needs, especially suitable for the manufacture of Mini/Micro LED chips. The equipment has the following main features and advantages:
High-precision cutting : The cutting depth accuracy of LS100-2 is σ≤1um, the XY cutting position accuracy is σ≤0.7um, and the cutting path width is ≤14um. These parameters ensure the high precision of chip cutting.
Efficient production : The equipment can cut about 10 million chips per hour, significantly improving production efficiency.
Patented technology : LS100-2 adopts a number of patented technologies to further improve the stability and reliability of cutting.
Scope of application : Applicable to 4-inch and 6-inch wafers, the wafer thickness variation is less than 15um, the workbench size is 168mm, 260mm, 290°, which can meet the cutting needs of different sizes and thicknesses.
In addition, the LS100-2 laser scribing machine is of great significance in the manufacturing of Mini/Micro LED chips. Since Mini/Micro LED chips have extremely high requirements for cutting accuracy, it is difficult for ordinary equipment to ensure both yield and output. LS100-2 solves this problem with high precision and high efficiency, meeting the industry's dual needs for yield and output.
The advantages of the ASM laser cutting machine LS100-2 mainly include high precision, high efficiency and strong adaptability.
First, the cutting depth accuracy of the LS100-2 laser scribing machine reaches σ≤1um, the XY cutting position accuracy is σ≤0.7um, and the cutting track width is ≤14um. These high-precision parameters ensure that extremely high accuracy can be maintained during the cutting process, meeting the production requirements with high precision requirements.
Secondly, the cutting speed of LS100-2 is also very fast. It can cut about 10 million chips per hour, significantly improving production efficiency. In addition, the speed of laser cutting technology can reach several meters per minute, far exceeding traditional cutting methods, further improving production efficiency.
